A. Krol, C.J. Sher, et al.
Surface Science
A. Krol, C.J. Sher, et al.
Surface Science
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
O.F. Schirmer, K.W. Blazey, et al.
Physical Review B
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007