Conference paper
Combined C-V/I-V front-end-of-line measurement
Stas Polonsky, Simeon Realov, et al.
ICMTS 2012
Conference paper
32nm yield learning using addressable defect arrays
Abstract
The Shorts and Opens Monitor (SOM) is a read-only addressable defect array that is widely and effectively used as a yield monitor in technology development and early stage of manufacturing. The SOM consists of scan-chain input/output, fully stackable DUTs, reference resistors for calibration, and a robust periphery design. The area efficiency and defect localization capabilities of the SOM greatly enable characterization of top yield detractors in 32nm process technology. © 2012 IEEE.