Conference paper
3D and 2D silicon photonic crystals for microphotonic circuits
Yurii Vlasov
QELS 2003
Conference paper
3D and 2D silicon photonic crystals for microphotonic circuits
Abstract
Photonic crystals might offer a unique solution for building ultradense photonic integrated circuits. Recent achievements in fabrication of silicon photonic crystals compatible with microelectronics processing will be reported.
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