Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Two general discrete time-domain transient analysis algorithms for the modeling of lossy and dispersive transmission lines are reviewed and compared. The first is based on the generalized method of characteristics through recursive convolution while the second is based on the more recent Padé macromodeling approach using synthesized lumped networks The different approximations made in these two algorithms are compared and computational evidence is presented to show that these two methods complement rather than compete with each other.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Revanth Kodoru, Atanu Saha, et al.
arXiv
Frank R. Libsch, Takatoshi Tsujimura
Active Matrix Liquid Crystal Displays Technology and Applications 1997
Xikun Hu, Wenlin Liu, et al.
IEEE J-STARS