John A. Hoffnagle, William D. Hinsberg, et al.
Microlithography 2003
No abstract available.
John A. Hoffnagle, William D. Hinsberg, et al.
Microlithography 2003
Yixiong Chen, Weichuan Fang
Engineering Analysis with Boundary Elements
Ronen Feldman, Martin Charles Golumbic
Ann. Math. Artif. Intell.
David L. Shealy, John A. Hoffnagle
SPIE Optical Engineering + Applications 2007