B.A. Hutchins, T.N. Rhodin, et al.
Surface Science
A novel micromachined silicon displacement sensor based on the conduction of heat between two surfaces through the ambient air is described. A displacement resolution of less than 1 nm and a dynamic range of more than 100 νm was achieved in a 10 kHz bandwidth. To minimize drift, the sensors are operated in pairs, using a differential measurement configuration. The power consumption of these devices is on the order of 10 mW per sensor, and the measured time response is described by a simple exponential with a time constant of approximately 100 νs. © 2005 IOP Publishing Ltd.
B.A. Hutchins, T.N. Rhodin, et al.
Surface Science
J.V. Harzer, B. Hillebrands, et al.
Journal of Magnetism and Magnetic Materials
Eloisa Bentivegna
Big Data 2022
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Langmuir