Revanth Kodoru, Atanu Saha, et al.
arXiv
A novel micromachined silicon displacement sensor based on the conduction of heat between two surfaces through the ambient air is described. A displacement resolution of less than 1 nm and a dynamic range of more than 100 νm was achieved in a 10 kHz bandwidth. To minimize drift, the sensors are operated in pairs, using a differential measurement configuration. The power consumption of these devices is on the order of 10 mW per sensor, and the measured time response is described by a simple exponential with a time constant of approximately 100 νs. © 2005 IOP Publishing Ltd.
Revanth Kodoru, Atanu Saha, et al.
arXiv
J.A. Barker, D. Henderson, et al.
Molecular Physics
K.N. Tu
Materials Science and Engineering: A
U. Wieser, U. Kunze, et al.
Physica E: Low-Dimensional Systems and Nanostructures