Conference paper
Bonding, interfacial effects and adhesion in dlc
A. Grill, B.S. Meyerson, et al.
Proceedings of SPIE 1989
No abstract available.
A. Grill, B.S. Meyerson, et al.
Proceedings of SPIE 1989
Ehud Altman, Kenneth R. Brown, et al.
PRX Quantum
Jaione Tirapu Azpiroz, Alan E. Rosenbluth, et al.
SPIE Photomask Technology + EUV Lithography 2009
Donald Samuels, Ian Stobert
SPIE Photomask Technology + EUV Lithography 2007