R.W. Gammon, E. Courtens, et al.
Physical Review B
No abstract available.
R.W. Gammon, E. Courtens, et al.
Physical Review B
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
A.B. McLean, R.H. Williams
Journal of Physics C: Solid State Physics
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989