Conference paper
Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
A new principle of least-squares estimation is described, which extends the old in allowing the estimation of the number of the parameters along with their values. Just as the old principle, the new one too uses only a sum of squares, which now, however, represent prediction errors rather than fitting errors. In a typical regression problem with independent normal data, the estimates of the number of the parameters, i.e. the number of the regressor functions, are shown to be consistent. © 1986 Oxford University Press.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Robert F. Gordon, Edward A. MacNair, et al.
WSC 1985
Ligang Lu, Jack L. Kouloheris
IS&T/SPIE Electronic Imaging 2002
Shu Tezuka
WSC 1991