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Modeling polarization for Hyper-NA lithography tools and masks
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This note shows how a standard result about linear inequality systems can be used to give a simple proof of the fact that the range of a nonatomic vector measure is convex, a result that is due to Liapounoff. © 1994.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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