Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The importance of transmission electron microscopy (TEM) as a tool for characterizing the crystal growth is discussed. High-resolution images show the crystallinity of bulk materials or the structure of nanoparticles, while analytical microscopy provides us with the distribution of elements present. This information is valuable to crystal growers, and allow them to optimize material microstructure. The developments in aberration correction allow a large polepiece gap, and hence more space around the specimen, that help to avoid the problems of accuracy in parameters of TEM.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Surendra B. Anantharaman, Joachim Kohlbrecher, et al.
MRS Fall Meeting 2020
I.K. Pour, D.J. Krajnovich, et al.
SPIE Optical Materials for High Average Power Lasers 1992
Peter J. Price
Surface Science