Mark A. Lantz, Simeon Furrer, et al.
IEEE Transactions on Magnetics
We describe a planar microelectromechanical systems (MEMS)-based x/y nanopositioner designed for parallel-probe storage applications. The nanopositioner is actuated electromagnetically and has x/y motion capabilities of ±60 μm. The mechanical components are fabricated from a single-crystal silicon wafer using a deep-trench-etching process. To render the system robust against vibration, we utilize a mass-balancing concept that makes the system stiff against linear shock, but still compliant for actuation, and therefore results in low power consumption. We present details of the finite-element model used to design the device as well as experimental results for the frequency response, actuation, and vibration-rejection properties of the nanopositioner. © 2006 IEEE.
Mark A. Lantz, Simeon Furrer, et al.
IEEE Transactions on Magnetics
Lars Jansen, André Schirmeisen, et al.
Physical Review Letters
Angeliki Pantazi, Simeon Furrer, et al.
ACC 2015
Christopher L. Ayala, Antonios Bazigos, et al.
ESSDERC 2016