Simeon Furrer, Angeliki Pantazi, et al.
INTERMAG 2015
We describe a planar microelectromechanical systems (MEMS)-based x/y nanopositioner designed for parallel-probe storage applications. The nanopositioner is actuated electromagnetically and has x/y motion capabilities of ±60 μm. The mechanical components are fabricated from a single-crystal silicon wafer using a deep-trench-etching process. To render the system robust against vibration, we utilize a mass-balancing concept that makes the system stiff against linear shock, but still compliant for actuation, and therefore results in low power consumption. We present details of the finite-element model used to design the device as well as experimental results for the frequency response, actuation, and vibration-rejection properties of the nanopositioner. © 2006 IEEE.
Simeon Furrer, Angeliki Pantazi, et al.
INTERMAG 2015
Thomas Morf, Bernhard Klein, et al.
Sensors and Actuators, A: Physical
Tommaso Stecconi, Roberto Guido, et al.
Advanced Electronic Materials
Lars Jansen, André Schirmeisen, et al.
Physical Review Letters