Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The (2×2) reconstructions of GaAs(1» 1» 1») are studied with use of a theoretical approach based on the calculation of the total energy in the context of density-functional theory and the pseudopotential approximation. New models are proposed for the As-rich and Ga-rich reconstructions. The relative chemical potential plays a crucial role in determining the lowest-energy configuration. The total-energy versus chemical-potential curves indicate the possibility of phase transitions between different configurations. One such transition concerning the experimentally observed (19 × 19) reconstruction can be explained as an intermediate phase between the proposed low-energy (2×2) reconstructions. © 1987 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
J.K. Gimzewski, T.A. Jung, et al.
Surface Science
Sung Ho Kim, Oun-Ho Park, et al.
Small
Peter J. Price
Surface Science