Conference paper
Characterization of line width variation
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
It is shown that a theory of elastic dielectrics, in which the stored electromechanical energy depends on the polarization gradient, accounts for both acoustical and optical activity. Formulas for the acoustical and optical rotatory powers of α-quartz are derived and the values of new material constants appearing in them are calculated from experimental data. © 1971.
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
Y.Y. Li, K.S. Leung, et al.
J Combin Optim
F. Odeh, I. Tadjbakhsh
Archive for Rational Mechanics and Analysis
David L. Shealy, John A. Hoffnagle
SPIE Optical Engineering + Applications 2007