S. Cohen, J.C. Liu, et al.
MRS Spring Meeting 1999
Paper
Action of far-ultraviolet radiation (185 nm) on poly(ethylene terephthalate) films: a method for controlled dry-etching
Abstract
Far-ultraviolet light (185 nm) rapidly etches poly(ethylene terephthalate) films without any subsequent processing. Both non-oxidative and oxidative mechanisms are operative. © 1982.
Related
J.A. Barker, D. Henderson, et al.
Molecular Physics
R.W. Gammon, E. Courtens, et al.
Physical Review B
Sung Ho Kim, Oun-Ho Park, et al.
Small