Conference paper
Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
This paper fills a gap which remained in "Stronger than Uniform Convergence of Multistep Difference Methods", Numerische Mathematik 8, 29 (1966), namely to show that from the stability of the homogeneous difference operator on the particular basis chosen in the solution space one can infer its stability on the whole solution space. © 1966 Springer-Verlag.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
A. Skumanich
SPIE OE/LASE 1992
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WSC 2003