Characterization of line width variation
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
In many applications, interpolation of experimental data exhibiting some geometric property such as nonnegativity, monotonicity or convexity is unacceptable unless the interpolant reflects these characteristics. This paper identifies admissible slopes at data points of various C1 interpolants which ensure a desirable shape. We discuss this question, in turn for the following function classes commonly used for shape preserving interpolations: monotone polynomials, C1 monotone piecewise polynomials, convex polynomials, parametric cubic curves and rational functions. © 1987 Springer-Verlag.
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
R.B. Morris, Y. Tsuji, et al.
International Journal for Numerical Methods in Engineering
Donald Samuels, Ian Stobert
SPIE Photomask Technology + EUV Lithography 2007
Heng Cao, Haifeng Xi, et al.
WSC 2003