Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
In many applications, interpolation of experimental data exhibiting some geometric property such as nonnegativity, monotonicity or convexity is unacceptable unless the interpolant reflects these characteristics. This paper identifies admissible slopes at data points of various C1 interpolants which ensure a desirable shape. We discuss this question, in turn for the following function classes commonly used for shape preserving interpolations: monotone polynomials, C1 monotone piecewise polynomials, convex polynomials, parametric cubic curves and rational functions. © 1987 Springer-Verlag.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009
Da-Ke He, Ashish Jagmohan, et al.
ISIT 2007