Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
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We investigate a special case of the graph partitioning problem: the partitioning of a sibling graph which is an ordered tree augmented with edges connecting consecutive nodes that share a common parent. We describe the algorithm, XS, and present a proof of its correctness. © 2008 Elsevier B.V. All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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