Ehud Altman, Kenneth R. Brown, et al.
PRX Quantum
Ehud Altman, Kenneth R. Brown, et al.
PRX Quantum
Kenneth L. Clarkson, K. Georg Hampel, et al.
VTC Spring 2007
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Ligang Lu, Jack L. Kouloheris
IS&T/SPIE Electronic Imaging 2002