Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We show how to replace the point functional of numerical analysis with types of stable functional of highly oscillatory solutions of differential equations. This replacement leads to the development of effective numerical methods for the stiff highly oscillatory problem. © 1976, American Mathematical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
George Markowsky
J. Math. Anal. Appl.
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SCC 2007
Sankar Basu
Journal of the Franklin Institute