Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
An explicit procedure for obtaining discrete approximations to general, nonlinear, fixed-time, continuous, optimal control problems with no intermediate trajectory constraints is presented. It is proved that, if the associated system of differential equations is linear in the control variable, then the optimal solutions of these approximations converge to extremals of the original continuous problem. © 1971 Plenum Publishing Corporation.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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