Conference paper
Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
J. L. Walsh showed that the differences of the partial sums of a function analytic only in a disk of radius ρ{variant} (>1) and the polynomials (of the same degrees) interpolating the function in roots of unity, converge to zero in |z| < ρ{variant}2. We reinterpret this problem in the context of analytic complexity, and examine it from that viewpoint. © 1987.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Juliann Opitz, Robert D. Allen, et al.
Microlithography 1998
Zhihua Xiong, Yixin Xu, et al.
International Journal of Modelling, Identification and Control
David L. Shealy, John A. Hoffnagle
SPIE Optical Engineering + Applications 2007