William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Correlations responsible for anisotropic-scattering properties of close-packed and tetrahedrally coordinated amorphous-model structures are discussed. It is shown that although there are regular planes of high density associated with the strong-scattering directions, the scattering anisotropy is not very different from that which occurs for random scattering. © 1976 The American Physical Society.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Gregory Czap, Kyungju Noh, et al.
APS Global Physics Summit 2025
Q.R. Huang, Ho-Cheol Kim, et al.
Macromolecules
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films