Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
n-type, 1013 and 2 × 1015 cm-3 doped germanium has been irradiated with 1-MeV electrons at liquid-helium and room temperatures. With the use of transient-capacitance spectroscopy, six electron traps and one hole trap were observed following irradiation at 4 K. Their energy levels have been determined to be at Ec-40, 120, 120, 260, 390, and 530 meV, and at Ev+250 meV. The isochronal annealing behavior of these traps, in addition to that of the four electron traps and of the four hole traps produced by room-temperature irradiation, has been studied in detail. Comparison of our results with previously published ones indicates that (i) the divacancy anneals around 150°C and the E center around 100°C, (ii) the two levels at Ec-120 meV are associated with the germanium interstitial or complexes involving a germanium interstitial, and (iii) there appears to be a vacancy level in the range 100-200 meV from the conduction band, which anneals at 100 K. © 1983 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
R.J. Gambino, N.R. Stemple, et al.
Journal of Physics and Chemistry of Solids
H.D. Dulman, R.H. Pantell, et al.
Physical Review B
Mark A. Eriksson, Mark Friesen, et al.
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