Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Analytic expressions can be obtained for the density and charge profiles from a pair of integral equations which include the effects, missing in the Poisson-Boltzmann approximation, of ionic cores. If the parameters in the expressions are adjusted to agree with theoretical conditions on the profiles and their derivatives at contact, results, comparable to those of more elaborate approximations, are obtained. © 1980.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Biancun Xie, Madhavan Swaminathan, et al.
EMC 2011
Robert W. Keyes
Physical Review B
Peter J. Price
Surface Science