William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Analytic expressions can be obtained for the density and charge profiles from a pair of integral equations which include the effects, missing in the Poisson-Boltzmann approximation, of ionic cores. If the parameters in the expressions are adjusted to agree with theoretical conditions on the profiles and their derivatives at contact, results, comparable to those of more elaborate approximations, are obtained. © 1980.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
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