Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
This paper introduces a generalization of totally monotone matrices, namely totally monotone partial matrices, shows how a number of problems in computational geometry can be reduced to the problem of finding the row maxima and minima in totally monotone partial matrices, and gives an O((m+nlog logn) algorithm for finding row maxima and minima in an n×m totally monotone partial matrix. In particular, if P and Q are nonintersecting n and m vertex convex polygons, respectively, our methods give an O((m+n)log logn) algorithm for finding for each vertex x of P, the farthest vertex of Q which is not visible to x, and the nearest vertex of Q which is not visible to x. © 1990.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Arnon Amir, Michael Lindenbaum
IEEE Transactions on Pattern Analysis and Machine Intelligence
W.C. Tang, H. Rosen, et al.
SPIE Optics, Electro-Optics, and Laser Applications in Science and Engineering 1991