Vineetha Mukundan, Steven Consiglio, et al.
Applied Physics Letters
The high flux and density of X-rays produced at synchrotrons provide the microelectronics industry with a powerful probe of the structure and behavior of a wide array of solid materials that are being developed for use in devices of the future. They also are of great use in determining why currently-used materials and processes sometimes fail. This paper describes the X20 X-ray beamline facility operated by IBM at the National Synchrotron Light Source, and presents a series of three industry challenges and results that illustrate the variety of techniques used and problems addressed. The value of this research ranges from solving short-term, technically specific problems to increasing our academic understanding of materials in general. Techniques discussed include high-resolution diffraction, time-resolved diffraction, texture measurements, and grazing-incidence diffraction. © 2005 Elsevier B.V. All rights reserved.
Vineetha Mukundan, Steven Consiglio, et al.
Applied Physics Letters
Adam Pyzyna, Robert L. Bruce, et al.
VLSI Technology 2015
Simone Raoux, Huai-Yu Cheng, et al.
Applied Physics Letters
François M. D'Heurle, Patrick Gas, et al.
Zeitschrift fuer Metallkunde/Materials Research and Advanced Techniques