Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
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SPIE Advanced Lithography 2007
This paper is concerned with the approximation of functions by linear combinations of multivariate B-splines. We construct and analyze local linear approximation schemes on certain uniform configurations. Furthermore we point out how these uniform configurations may be refined locally while still preserving the desired global smoothness of the splines. © 1981.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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