Conference paper
Single and dual wavelength exposure of photoresist
J. LaRue, C. Ting
Proceedings of SPIE 1989
We consider a single server at which customers of several classes arrive according to a stochastic point process and the server may take vacations arbitrarily. We show that under stationary conditions, the ASTA property (Arrivals See Time Averages) implies an M/G/1-like load decomposition property. A network of quasi-reversible symmetric queues with server vacations is given as an example for non-Poisson arrivals. © 1991.
J. LaRue, C. Ting
Proceedings of SPIE 1989
Peter Wendt
Electronic Imaging: Advanced Devices and Systems 1990
John A. Hoffnagle, William D. Hinsberg, et al.
Microlithography 2003
T. Graham, A. Afzali, et al.
Microlithography 2000