Xikun Hu, Wenlin Liu, et al.
IEEE J-STARS
Thin polymer films with cylindrical microdomains of controlled size were produced from diblock copolymer/homopolymer mixtures. It was demonstrated that not only do the spatial order and orientation of the domains remain unperturbed but also that two distinct sizes of pores can be accessed from the same film.
Xikun Hu, Wenlin Liu, et al.
IEEE J-STARS
Ronald Troutman
Synthetic Metals
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007