S. Cohen, J.C. Liu, et al.
MRS Spring Meeting 1999
S. Cohen, J.C. Liu, et al.
MRS Spring Meeting 1999
A. Nagarajan, S. Mukherjee, et al.
Journal of Applied Mechanics, Transactions ASME
Ranulfo Allen, John Baglin, et al.
J. Photopolym. Sci. Tech.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007