Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering
No abstract available.
Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering
F.J. Himpsel, T.A. Jung, et al.
Surface Review and Letters
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A.B. McLean, R.H. Williams
Journal of Physics C: Solid State Physics