G. Binnig, H. Fuchs, et al.
EPL
The scanning tunneling microscope is proposed as a method to measure forces as small as 10-18 N. As one application for this concept, we introduce a new type of microscope capable of investigating surfaces of insulators on an atomic scale. The atomic force microscope is a combination of the principles of the scanning tunneling microscope and the stylus profilometer. It incorporates a probe that does not damage the surface. Our preliminary results in air demonstrate a lateral resolution of 30 A and a vertical resolution less than 1 A. © 1986 The American Physical Society.
G. Binnig, H. Fuchs, et al.
EPL
G. Binnig, H. Rohrer, et al.
Surface Science
J.-S. Park, D.-W. Lee, et al.
SENSORS 2005
P. Vettiger, T.R. Albrecht, et al.
IEDM 2003