Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The high spatial resolution of the atomic force microscope (AFM) has motivated recent efforts to apply the technique to high-density data storage. However, little attention has been given to satisfying the other necessary attributes required of any new data storage technology. Using a system based on reading topographic data features on a rotating disk with a high-frequency piezoresistive cantilever, we address several of these issues. A timing-based control method for data tracking is demonstrated and shown to maintain the radial tip position to within a standard deviation of 31 nm. While maintaining the tip position under both load and tracking control with a disk velocity of 3 cm=s, 200 nm diameter marks are read continuously for over 145 h without any significant change in signal amplitude. This represents a tip travel distance of 16 km, and each bit was read over 500 000 times. © 1998 Springer-Verlag.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
R.J. Gambino, N.R. Stemple, et al.
Journal of Physics and Chemistry of Solids
Fernando Marianno, Wang Zhou, et al.
INFORMS 2021