Conference paper
The Micro to Nano Addressing Block (MNAB)
K. Gopalakrishnan, R.S. Shenoy, et al.
IEDM 2005
We present a force microscope which uses a feedback-controlled differential fiber interferometer for the measurement of the deflection of the force-sensing cantilever. Due to the differential principle, and the feedback control, the influence of thermal and mechanical drifts or fluctuations is minimized. Topographic images in both modes, the attractive ac mode and the repulsive dc mode, have been taken to demonstrate a first performance of the instrument.
K. Gopalakrishnan, R.S. Shenoy, et al.
IEDM 2005
P.C.D. Hobbs, Y. Martin, et al.
Proceedings of SPIE 1989
M. Nonnenmacher, H.K. Wickramasinghe
Applied Physics Letters
Y. Martin, F. Zenhausern, et al.
Applied Physics Letters