William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Paper
Auger analyzer translation using ball bushings
Abstract
We describe a ball bushing assembly which supports a cylindrical mirror analyzer allowing it to be translated 5.5 in. By a linear motion feedthrough. The assembly mounts on an 8-in. Flange and avoids the use of bellows. © 1988, American Vacuum Society. All rights reserved.
Related
Surendra B. Anantharaman, Joachim Kohlbrecher, et al.
MRS Fall Meeting 2020
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
J.V. Harzer, B. Hillebrands, et al.
Journal of Magnetism and Magnetic Materials