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Communications of the ACM
No abstract available.
Rafae Bhatti, Elisa Bertino, et al.
Communications of the ACM
Rolf Clauberg
IBM J. Res. Dev
Donald Samuels, Ian Stobert
SPIE Photomask Technology + EUV Lithography 2007
Frank R. Libsch, S.C. Lien
IBM J. Res. Dev