Cyril Cabral, Robert B. Laibowitz, et al.
Microelectronic Engineering
Researchers developed an advanced automation and control software package to automatically acquire large sets of images from different positions of a chip using air-gap objectives and then mathematically stitch them together to create a high-resolution image with a very large field of view (FOV). A key component of this technology was the development of a generic software interface to several analytical tools, so that key functionalities of the tools, such as stage movement, instrument condition setup, and data collection, could be operated in a programmatic way from other dedicated software packages or from different tools involved in the experiment. These interfaces functioned without a software application programming interface (API) from the tool vendor, and they could be addressed using other software and over the network.
Cyril Cabral, Robert B. Laibowitz, et al.
Microelectronic Engineering
Ernest Wu, Franco Stellari, et al.
Applied Physics Letters
Anuja Sehgal, Peilin Song, et al.
ESSCIRC 2006
Franco Stellari, Peilin Song, et al.
ISTFA 2003