S. Cohen, T.O. Sedgwick, et al.
MRS Proceedings 1983
No abstract available.
S. Cohen, T.O. Sedgwick, et al.
MRS Proceedings 1983
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
I. Morgenstern, K.A. Müller, et al.
Physica B: Physics of Condensed Matter
Thomas H. Baum, Carl E. Larson, et al.
Journal of Organometallic Chemistry