Characterization of line width variation
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
In a balls-in-bins process with feedback, balls are sequentially thrown into bins so that the probability that a bin with n balls obtains the next ball is proportional to f(n) for some function f. A commonly studied case where there are two bins and f(n) = np for p > 0, and our goal is to study the fine behaviour of this process with two bins and a large initial number t of balls. Perhaps surprisingly, Brownian Motions are an essential part of both our proofs. For p > 1/2, it was known that with probability 1 one of the bins will lead the process at all large enough times. We show that if the first bin starts with t + λ√t balls (for constant λ ∈ ℝ), the probability that it always or eventually leads has a non-trivial limit depending on λ. For p ≤ 1/2, it was known that with probability 1 the bins will alternate in leadership. We show, however, that if the initial fraction of balls in one of the bins is > 1/2, the time until it is overtaken by the remaining bin scales like ⊖(t1+1/(t-2p) for p < 1/2 and exp⊖(t)) for p = 1/2. In fact, the overtaking time has a non-trivial distribution around the scaling factor, which we determine explicitly. Our proofs use a continuous-time embedding of the balls-in-bins process (due to Rubin) and a non-standard approximation of the process by Brownian Motion. The techniques presented also extend to more general functions f.
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
Amir Ali Ahmadi, Raphaël M. Jungers, et al.
SICON
Moutaz Fakhry, Yuri Granik, et al.
SPIE Photomask Technology + EUV Lithography 2011
Heng Cao, Haifeng Xi, et al.
WSC 2003