Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The core of a Markov partition is the nonwandering set of the map restricted to the boundary of the partition. We show that the core of a Markov partition is always a finitely presented system. Then we show that every one sided sofic system occurs as the core of a Markov partition for an n-fold covering map on the circle and every two sided sofic system occurs as the core of a Markov partition for a hyperbolic automorphism of the two dimensional torus. © 1992 American Mathematical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Donald Samuels, Ian Stobert
SPIE Photomask Technology + EUV Lithography 2007
Ligang Lu, Jack L. Kouloheris
IS&T/SPIE Electronic Imaging 2002
Jonathan Ashley, Brian Marcus, et al.
Ergodic Theory and Dynamical Systems