Julien Autebert, Aditya Kashyap, et al.
Langmuir
This paper compares on-wafer thru-reflect-line (TRL) and off-wafer short-open-load-thru (SOLT) and line-reflect-reflect-match (LRRM) vector-network-analyzer probe-tip calibrations for amplifier characterization and parasitic-extraction calibrations for transistor characterization on silicon integrated circuits at millimeter-wave frequencies. We show that on-wafer calibrations generally outperform off-wafer and LRRM probe-tip calibrations at millimeter-wave frequencies. However, certain parasitic-extraction algorithms designed specifically to remove contact pads, transmission-lines, and access vias correct for much of the error in off-wafer calibrations. © 2014 IEEE.
Julien Autebert, Aditya Kashyap, et al.
Langmuir
S. Cohen, T.O. Sedgwick, et al.
MRS Proceedings 1983
M.A. Lutz, R.M. Feenstra, et al.
Surface Science
Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering