Abstract
The characteristics of miniaturized microfabricatd cantilever array sensors are discussed. The sensor arrays can be used during an ultrasensitive mechanical way of converting (bio-) chemical or physical processes into a recordable signals. Alongwith enthalpy changes during phase transition, cantilever sensor array techniques help to study physisorption and chemisorption processes. Miniaturized cantilever sensors can be operated in vacuum, air or liquid mediums and fast response times, high sensitivity and direct transduction without any label are their major advantages.