Shiyi Chen, Daniel Martínez, et al.
Physics of Fluids
Chemical vapor deposition environments, while technologically quite important, are difficult to study using traditional analytical probes, such as electron-based techniques and optical tools. In this work, we will describe some of the ways in which X-rays can be applied to understand not only the gas phase composition through fluorescence, but also surface processes such as nucleation and diffusion. © 1995.
Shiyi Chen, Daniel Martínez, et al.
Physics of Fluids
Dipanjan Gope, Albert E. Ruehli, et al.
IEEE T-MTT
Shaoning Yao, Wei-Tsu Tseng, et al.
ADMETA 2011
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films