CMOS-integrated 40GHz germanium waveguide photodetector for On-chip optical interconnects

Compact (0.7μ m× 20μ m) germanium waveguide photodetector operating at 40Gbps is demonstrated. Monolithic integration of high-quality Ge-on-insulator single-crystalline layer into the CMOS stack was achieved by lateral seeded crystallization during CMOS wells activation anneal above germanium melting temperature. ©2009 IEEE.