Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We have studied the structures and transitions of high-density xenon monolayers on single-crystal graphite using high-resolution synchrotron x-ray diffraction techniques. In contrast to the previous x-ray experiment, we find that at low temperatures, the xenon has a commensurate 3×3R 30°structure for a broad range of coverages. With decreasing temperature the novel reentrant sequence: aligned rotated aligned, occurs; this sequence is followed by a first-order incommensurate-commensurate transition. © 1987 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
R. Ghez, M.B. Small
JES
O.F. Schirmer, K.W. Blazey, et al.
Physical Review B
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009