Xikun Hu, Wenlin Liu, et al.
IEEE J-STARS
Paper
Comment on “The diffusion of antimony in heavily doped and (sic) n- and p-type silicon” [J. Mater. Res. 1, 705 (1986)]
Abstract
No abstract available.
Related
R. Ghez, M.B. Small
JES
J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering
Kigook Song, Robert D. Miller, et al.
Macromolecules