Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
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Electron paramagnetic resonance and magnetic susceptibility measurements on Gd3+ and Cu2+ ions in the antiferromagnetic "green phase" compounds Gd2BaCuO5 and Y2BaCuO5 are reported and their relationships to corresponding measurements in the "black phase" high Tc superconductors GdBa2Cu3O7 and YBa2Cu3O7 are described. © 1988.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering
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SPIE Optical Materials for High Average Power Lasers 1992
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