Optimization of real phase-mask performance
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
Application of the waveform relaxation algorithm to the differential-algebraic equations generated by problems in circuit and semiconductor device simulation have demonstrated that the method often contracts uniformly in time. In addition, instabilities in the underlying multirate integration method have not been observed. In this paper, it is proved that multirate A-stability and waveform relaxation uniform contractivity are connected, and use the result to show that the first and second-order backward-difference based multirate methods are A-stable when applied to block diagonally-dominant problems. © 1991, MCB UP Limited
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
T. Graham, A. Afzali, et al.
Microlithography 2000
Shu Tezuka
WSC 1991
Zhihua Xiong, Yixin Xu, et al.
International Journal of Modelling, Identification and Control