Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
A change-point model is considered where the canonical parameter of an exponential family drifts from its control value at an unknown time and changes according to a broken-line regression. Necessary and sufficient conditions are obtained for the existence of consistent change-point estimators. When sufficient conditions are met, it is shown that the maximum likelihood estimator of the change point is consistent, unlike the classical abrupt change-point models. Results are extended to the case of nonlinear trends and nonequidistant observations. © 2003 Elsevier B.V. All rights reserved.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Mario Blaum, John L. Fan, et al.
IEEE International Symposium on Information Theory - Proceedings
Trang H. Tran, Lam Nguyen, et al.
INFORMS 2022
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IS&T/SPIE Electronic Imaging 1996