John A. Hoffnagle, William D. Hinsberg, et al.
Microlithography 2003
No abstract available.
John A. Hoffnagle, William D. Hinsberg, et al.
Microlithography 2003
R.B. Morris, Y. Tsuji, et al.
International Journal for Numerical Methods in Engineering
Michael E. Henderson
International Journal of Bifurcation and Chaos in Applied Sciences and Engineering
M. Tismenetsky
International Journal of Computer Mathematics